Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation
Reexamination Certificate
2008-01-01
2008-01-01
Allen, Andre J. (Department: 2855)
Measuring and testing
Fluid pressure gauge
With pressure and/or temperature compensation
Reexamination Certificate
active
07313966
ABSTRACT:
A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. The nonvolatile memory may contain calibration parameters for a heat-sensitive vacuum sensor to compensate for the temperature gradients generated by the ionization gauge. The calibration parameters are a function of calibration data determined when the ionization gauge is both on and off. The nonvolatile memory may store a window of measurement data of the vacuum gauge that is updated at predetermined time intervals and in response to an event, such as an error event, to aid in investigating the cause of vacuum gauge malfunction or failure.
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Arnold Paul C.
Carmichael Larry K.
Rutt Paul M.
Allen Andre J.
Brooks Automation Inc.
Hamilton Brook Smith & Reynolds P.C.
Jenkins Jermaine
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