Method and apparatus for storing measured data from sub-regions

Details Method and apparatus for storing measured data from sub-regions Method and apparatus for storing measured data from sub-regions

1988-04-07

1989-08-22

Gruber, Felix D.

Boots, shoes, and leggings

2504922, 2504923, G21K 504, G06F 1536

Patent

active

048602256

ABSTRACT:
A method and an apparatus for storing measured data from a sputter crater which is generated and analyzed in a secondary ion mass spectrometer is considerably more simple and cost-effective than techniques requiring complete data storage and is an improvement over the known standard integral method. The region swept by the ion beam of a secondary ion mass spectrometer is subdivided into a plurality of sub-areas, one location in a memory is assigned to each of the sub-areas, the signal components occurring from the individual sub-areas are stored in the assigned memory locations during a sweep of the sputter crater with the ion beam, and the measured data are evaluated after the end of at least one scan of the sputter crater.

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