Method and apparatus for sterilization of and treatment with ozo

Details Method and apparatus for sterilization of and treatment with ozo Method and apparatus for sterilization of and treatment with ozo

1994-06-28

1995-09-05

Nessler, Cynthia L.

Liquid purification or separation

Processes

Utilizing electrical or wave energy directly applied to...

210760, 210192, 210259, 210900, C02F 146, C02F 170, C02F 172

Patent

active

054476402

ABSTRACT:
Disclosed are a method for treatment with ozonized water which comprises feeding primary pure water to an ultrapure-water producing device containing at least a polisher to convert the primary pure water to ultrapure water, injecting an ozone-containing gas into the ultrapure water to produce ozonized water, sending the ozonized water to a point of use, using the ozonized water for treatment, and circulating the resulting spent ozonized water to the ultrapure-water producing device for reuse or discharging the spent water, wherein the method further comprises supplying a hydrogen-containing gas to the spent ozonized water at a point downstream from the use point to remove residual ozone from the ozonized water, a method for the ozone sterilization of ultrapure water which comprises feeding primary pure water from a primary-pure-water tank to an ultrapure-water producing device containing at least a polisher to convert the primary pure water to ultrapure water, sending the ultrapure water to a use point through a feed line, treating an object with the ultrapure water at the use point, and circulating the resulting spent pure water to the primary-pure-water tank through a return line, which method includes injecting ozone into the spent pure water between the use point and the primary-pure-water tank and supplying a hydrogen-containing gas to the primary pure water between the primary-pure-water tank and the ultrapure-water producing device to conduct residual-ozone removal and oxygen elimination, and apparatuses for use in practicing these methods.

REFERENCES:
patent: 4548716 (1985-10-01), Boeve
patent: 4842723 (1989-06-01), Parks et al.
patent: 4990260 (1991-02-01), Pisani
patent: 5073268 (1991-12-01), Saito et al.
patent: 5114549 (1992-05-01), Shimamune et al.
patent: 5124033 (1992-06-01), Ohmi et al.
patent: 5160429 (1992-11-01), Ohmi et al.
patent: 5190627 (1993-03-01), Saito et al.
patent: 5259972 (1993-11-01), Miyamaru et al.

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