Method and apparatus for static RAM

Fishing – trapping – and vermin destroying

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437 69, H01L 2184

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active

055189393

ABSTRACT:
A thin film transistor in which a device active layer is formed on an insulation film, in which an interface state density present at the interface between the active layer and the insulation film is set to less than 1.times.10.sup.11 /cm.sup.2. The characteristics of TFT can be enhanced by decreasing the leak current and SRAM memory cell can be provided with easy design for the process and the structure while avoiding increase in the resistance and additional capacitance and ensuring voltage withstand.

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Wolf, "Silicon Processing for the VLSI Era, Volume II", pp. 23-26, 1986, Lattice Press.
Ghandhi, "VLSI Fabrication Principles: Silicon and Gallium Arsenide", pp. 372-373, 1983, John Wiley and Sons.

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