Coherent light generators – Particular beam control device – Optical output stabilization
Reexamination Certificate
2008-04-09
2010-10-26
Harvey, Minsun (Department: 2828)
Coherent light generators
Particular beam control device
Optical output stabilization
C372S019000, C372S029011, C372S029020, C372S055000, C372S100000, C372S102000
Reexamination Certificate
active
07822084
ABSTRACT:
According to aspects of an embodiment of the disclosed subject matter, method and apparatus are disclose that may comprise adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, without utilizing any beam magnification control, or adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for other than bandwidth control, and adjusting a differential timing between gas discharges in the seed laser and amplifier laser for bandwidth control, based on the error signal, or for control of another laser operating parameter other than bandwidth, while utilizing beam magnification control for bandwidth control based on the error signal.
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Jacques Robert N.
O'Brien Kevin M.
Carter Michael
Cymer Inc.
DiBerardino Law LLC
Harvey Minsun
LandOfFree
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