Method and apparatus for sputtering photoconductive coating on e

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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204298, C23C 1500

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active

041371429

ABSTRACT:
Apparatus for sputtering a photoconductive coating onto endless flexible belts or cylinders is provided in which the belt or cylinder is shaped in the form of an elongate oval within the sputtering machine and is adapted to be passed over supports whose diameter is substantially less than the diameter of the cylinder if it is a cylinder or of the cylinder which is capable of being formed out of the belt. One support may be a drum and the other support is a structure which may be another drum, preferably idling. In this way it is feasible to have a sputtering machine that is much more narrow than one which would have to sputter a cylinder or belt on a single drum if the supports are mounted vertically.
The second support structure, whether drum or otherwise is adjustably mounted so that its distance from the first support is capable of being varied to enable cylinders or belts of different size to be sputtered. It is also biased to move away from the first support to maintain tension in the substrate member being sputtered.

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patent: 3829373 (1974-08-01), Kuehnle
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