Method and apparatus for sputtering multiple cylinders simultane

Details Method and apparatus for sputtering multiple cylinders simultane Method and apparatus for sputtering multiple cylinders simultane

1977-12-27

1979-04-24

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204298, C23C 1500

Patent

active

041510593

ABSTRACT:
Method and apparatus for sputter coating of printing or similar type cylinders by means of r.f. sputtering in which each of the cylinders being coated comprises a thin, metal sleeve of cylindrical configuration mounted on a mandrel. A plurality of mandrels is mounted in a sputtering chamber on a spider which is rotated coaxially with a cylindrical target, the target being stationary. A fixed ring gear cooperates with pinions on each of the mandrels to impart an epicyclic movement to the mandrels, each of which mounts a sleeve.
An r.f. sputtering condition is created in the chamber between the target and the cylinders so that a plurality of cylinders is coated simultaneously.
The chamber can be opened to remove the cylinders after sputtering to replace them with others to be coated, this without disturbing the target.

REFERENCES:
patent: 3723276 (1973-03-01), Lane et al.
patent: 3725238 (1973-04-01), Fischbein et al.
patent: 4014779 (1977-03-01), Kuehnle

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