Coating processes – Centrifugal force utilized
Patent
1997-05-30
1999-06-29
Bell, Janyce
Coating processes
Centrifugal force utilized
427336, 4273855, 118 52, 437231, B05D 312
Patent
active
059166312
ABSTRACT:
Disclosed is an apparatus and a method for spin coating chemicals over a surface of a substrate. The apparatus includes a bowl for supporting a substrate, the bowl has a plurality of drain holes defined below the level of the substrate. The apparatus further includes a lid having a flat surface configured to lie a predetermined distance above the substrate and mate with the bowl. Further, a plurality of injection holes defined in the bowl for applying a solvent to an underside of the substrate are included. The plurality of injection holes are defined in along an injection ring that is configured to receive the liquid solvent that is to be applied near an outer radius of the underside of the substrate, and the injection ring is spaced apart from the underside of the substrate.
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Bell Janyce
The Fairchild Corporation
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