Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2008-07-08
2008-07-08
Nguyen, Kiet T (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S311000
Reexamination Certificate
active
11701413
ABSTRACT:
A specimen fabrication apparatus, including: an ion beam irradiating optical system to irradiate a sample placed in a chamber, with an ion beam, a specimen holder to mount a specimen separated by the irradiation of the ion beam, a holder cassette to hold the specimen holder, and a sample stage to hold the sample and the holder cassette, wherein said holder cassette is transferred to outside of the chamber in a condition of holding said specimen holder with the specimen mounted.
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Doi Yasunori
Kawanami Yoshimi
Madokoro Yuichi
Tomimatsu Satoshi
Umemura Kaoru
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Nguyen Kiet T
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