Method and apparatus for simultaneously measuring...

Details Method and apparatus for simultaneously measuring... Method and apparatus for simultaneously measuring...

2007-09-11

2007-09-11

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S073000, C356S493000

Reexamination Certificate

active

10874352

ABSTRACT:
Disclosed herein is a method and apparatus for simultaneously measuring a displacement and angular variations. The method and apparatus of the present invention allows light radiated from a single light source to be placed along a light axis so as to simultaneously measure a distance (displacement) and angular variations that are different physical quantities, so that the displacement and angular variations of the measuring device of a precision measuring apparatus or machining device of a machine tool moved by a stage can be simultaneously measured without an Abbe error.

REFERENCES:
patent: 6252667 (2001-06-01), Hill et al.
patent: 7016050 (2006-03-01), Farrell et al.
Verification of the sub-nanometric capability of an NPL differeential plane mirror interferometer with a capacitance probe, Downs et al, Measurement Science and Technology, 1998, pp. 1437-1440.

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