Method and apparatus for simultaneous 2-D and topographical...

Details Method and apparatus for simultaneous 2-D and topographical... Method and apparatus for simultaneous 2-D and topographical...

2007-08-07

2007-08-07

Nguyen, Sang H. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S606000, C356S602000, C250S216000, C250S548000

Reexamination Certificate

active

10753391

ABSTRACT:
Apparatus for sensing information regarding a surface including a first plurality of optical elements arranged to acquire two dimensional information about a surface, a second plurality of optical elements arranged to acquire topographical information about the surface, wherein the first plurality and the second plurality of optical elements are arranged to simultaneously provide the two dimensional information and the topographical information to at least partially non-overlapping portions of a single sensor array.

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