Electricity: measuring and testing – Using ionization effects – For monitoring pressure
Reexamination Certificate
2006-10-26
2008-11-25
Nguyen, Vincent Q. (Department: 2831)
Electricity: measuring and testing
Using ionization effects
For monitoring pressure
C313S240000
Reexamination Certificate
active
07456634
ABSTRACT:
Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.
REFERENCES:
patent: 4013913 (1977-03-01), Driscoll et al.
patent: 4460317 (1984-07-01), Kern et al.
patent: 5296817 (1994-03-01), Bills et al.
patent: 5422573 (1995-06-01), Bills et al.
patent: 5602441 (1997-02-01), Ohsako et al.
patent: 5973906 (1999-10-01), Stevenson et al.
patent: 6239429 (2001-05-01), Blessing et al.
patent: 6305975 (2001-10-01), Steiner
patent: 6313638 (2001-11-01), Sun et al.
patent: 6515482 (2003-02-01), Kawasaki
patent: 7035077 (2006-04-01), Brendel
patent: 7129708 (2006-10-01), Liu et al.
patent: 7352187 (2008-04-01), Knapp et al.
patent: 2002/0196830 (2002-12-01), Ujazdowski et al.
patent: 2007/0179554 (2007-08-01), Iyer et al.
Arnold, P.C., et al., “Development, Design and Calibration Methods for an Improved Hot Cathode Ionization Gauge for Vacuum Measurements,” NCSL International Workshop & Symposium, pp. 1-13 (2004).
Arnold, P.C., et al., “Stable and Reproducible Bayard-Alpert Ionization Gauge,” J. Vac. Sci. Technol. A, vol. 12, No. 2, pp. 580-586 (Mar./Apr. 1994).
Groβe-Bley, Werner, “A Hot Cathode Ionization Gauge Transmitter for Industrial Vacuum Measurement,”Vacuum51(1):31-37 (1998).
Brooks Automation Inc.
Hamilton Brook Smith & Reynolds P.C.
Nguyen Hoai-An D
Nguyen Vincent Q.
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