Method and apparatus for separating member

Details Method and apparatus for separating member Method and apparatus for separating member

2005-02-08

2005-02-08

Osele, Mark A. (Department: 1734)

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

C156S345420, C083S177000, C438S455000, C438S458000

Reexamination Certificate

active

06852187

ABSTRACT:
This invention is to appropriately separate a bonded substrate stack regardless of some distortion in the bonded substrate stack or the like. This separating apparatus includes a first nozzle which forms a jet with a large width and a second nozzle which forms a jet with a small width. When the outer portion of a bonded substrate stack is to be separated, a jet formed by the first nozzle is used. After that, when a portion inside the outer portion is to be separated, a jet formed by the second nozzle is used.

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