Method and apparatus for separating fixture-induced error from m

Details Method and apparatus for separating fixture-induced error from m Method and apparatus for separating fixture-induced error from m

1985-11-26

1988-06-07

Lall, Parshotam S.

Boots, shoes, and leggings

364559, 364571, 33550, 33551, 738658, G01B 700, G01B 728, G01C 2500

Patent

active

047501413

ABSTRACT:
The present invention discloses apparatus and method for electronically determining and compensating mechanical fixture induced errors from desired object related information in a measurement system such that data acquisition is obtained with a precision very much better than the manufacturing tolerances of the mechanical fixture. In the preferred embodiment, bow and warp profiles of a semiconductor wafer are obtained with an X, .theta., and Z moveable wafer-receiving chuck that have an accuracy very much better than the mechanical tolerances of the X, .theta., and Z moveable chuck. The system provides for measurement of objectrelated information in plural orientations. Signal processing is disclosed for separating out of the object related information X and .theta. fixture induced error contributions to the data arising from mechanical tolerance of the fixture. Signal processing is disclosed for compensating bow and warp profiles of semiconductor wafers in accordance with the X and .theta. contributions fixture induced error are disclosed in order to provide a measurement accuracy not limited by the mechanical tolerances of the X, .theta., and Z moveable wafer after receiving chuck.

REFERENCES:
patent: 3899832 (1975-08-01), Hunyar
patent: 4052603 (1977-10-01), Karlson
patent: 4154530 (1979-05-01), Connolly, Jr. et al.
patent: 4184263 (1980-01-01), Tatsumi et al.
patent: 4342089 (1982-07-01), Hall
patent: 4357668 (1982-11-01), Schwartz et al.
patent: 4488249 (1984-12-01), Baker
patent: 4603487 (1986-08-01), Matsunata

Affiliated with

Also associated with

Rating

Method and apparatus for separating fixture-induced error from m does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for separating fixture-induced error from m, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for separating fixture-induced error from m will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-848796