Method and apparatus for sensing the natural frequency of a cant

Details Method and apparatus for sensing the natural frequency of a cant Method and apparatus for sensing the natural frequency of a cant

1998-06-04

2000-03-28

Williams, Hezron

Measuring and testing

Gas analysis

By vibration

73 2406, 73579, 422 88, G01N 2700

Patent

active

060416424

ABSTRACT:
A method and apparatus for measuring the natural resonant frequency of a spring element by monitoring a phase difference between an output signal from the spring element and an input signal to the spring element and by adjusting frequency of the input signal until a detected phase difference signals that the natural resonant frequency has been reached. The method and apparatus are applied to a micro-cantilevered elements used to measure gas compositions and concentrations. Such elements are provided with coatings that absorb gas to cause deflections and changes in the mass or spring constant of the cantilevered element. These changes correspond to changes in the natural resonant frequency of the cantilevered element which are measured using the method and apparatus described herein.

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