Method and apparatus for sensing in-plane deformation of a surfa

Optics: measuring and testing – Material strain analysis – By light interference detector

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G01L 124

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043221629

ABSTRACT:
A surface on which there is a regular periodic pattern, often a relief pattern (12), is deformed, and in-plane deformation is sensed by illuminating the deformed pattern with a beam (12) of coherent light so that light is reflected as one zero order beam and a plurality of diffracted beams; two of the beams (16,18) are combined so that they interfere in a manner related to the deformation along the direction of intersection of the surface plane with the plane in which the two interfering beams lie. The magnitude and direction of in-plane deformation in one or more directions, and the magnitude and direction of the maximum in-plane stress or strain, can be determined automatically.

REFERENCES:
patent: 3709610 (1973-01-01), Kruegle
patent: 3726595 (1973-04-01), Matsumoto
patent: 3822942 (1974-07-01), Hock
patent: 3976381 (1976-08-01), Walker
patent: 3985444 (1976-10-01), Takashima
patent: 4030831 (1977-06-01), Gowrinathan
Journal of Physics & Scientific Instruments, 1972, vol. 5, pp. 833-845.
Instruments and Control Systems, Dec. 1971, pp. 64-66.
Laser Range Instrumentation, (Society of Photo-Optical Instrumentation Engineers), Oct. 1967, pp. i & 93-98.

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