Method and apparatus for sensing and controlling the intensity o

Details Method and apparatus for sensing and controlling the intensity o Method and apparatus for sensing and controlling the intensity o

1983-04-18

1984-10-23

Newsome, John H.

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to condition of coating material

118 501, 118708, 427 10, 427 39, C23C 1308

Patent

active

044781733

ABSTRACT:
A method of and apparatus for accurately sensing and reproducibly controlling the intensity of electromagnetic energy in the decomposition region of a deposition chamber. The apparatus includes a detector adapted to (1) monitor the level of radiation emitted from the decomposition region and (2) provide an output signal indicative of said level. The invention further includes circuitry for (1) comparing the signal from the detector with a reference signal indicative of a preselected level of energy, and (2) generating a correction signal indicative of the actual level of energy in the decomposition region relative to the preselected level of energy. According to the method of this invention, the correction signal may be utilized to regulate the source of electromagnetic energy so that the preselected level of electromagnetic energy within the decomposition region is kept constant despite fluctuations in other operating parameters.

REFERENCES:
patent: 3441836 (1969-04-01), Riley
patent: 3738926 (1973-06-01), Westwood et al.
patent: 4036167 (1977-07-01), Lu
patent: 4242188 (1980-12-01), Niinomi et al.
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 4405989 (1983-09-01), Tsukada et al.

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