Method and apparatus for semiconductor profiling using an optica

Details Method and apparatus for semiconductor profiling using an optica Method and apparatus for semiconductor profiling using an optica

1976-04-02

1977-09-27

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, G01R 3126

Patent

active

040514374

ABSTRACT:
A method and apparatus of determining defects in semiconductors, by scann with small spot of light. As the semiconductor is scanned, a voltage is generated which may be used to indicate gross defects as well as the reduction in carrier lifetime due to the defects.

REFERENCES:
patent: 3039056 (1962-06-01), Many et al.
patent: 3549999 (1970-12-01), Norton
patent: 3678384 (1972-07-01), Oatley
patent: 3745454 (1973-07-01), Nikirk et al.

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