Fishing – trapping – and vermin destroying
Patent
1990-03-09
1991-12-03
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
361381, 16510433, H01L 2346
Patent
active
050700405
ABSTRACT:
In a semiconductor device, a thin, synthetic diamond film (i.e. a man made film) enhances the transfer of heat from a semiconductor circuit chip to a cooling medium. The heat generating semiconductor circuit chip is located in efficient thermal transfer engagement with one surface of a synthetically deposited diamond film. The opposite surface of the diamond film forms the bottom wall of a cavity that contains a cooling medium. In one embodiment of the invention, the cavity is formed by depositing the diamond film on the surface of a silicon substrate, and then etching the silicon substrate to form an open-top cavity having side walls that comprise the silicon substrate, and having a bottom wall that comprises the diamond film. In a second embodiment of the invention, the open-top cavity is formed by an apertured silicon preform that is bonded to the diamond film. A capping member closes the top of the cavity. A cooling medium is placed within the cavity. A fluid cooling medium may be circulated through the cavity by the use of an inlet and an outlet that are located in the capping member.
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"Fabrication and High Temperature Characteristics of Diamond Electronic Devices", by Y. Tzeng, T. H. Lin, J. L. Davidson, and L. S. Lan, IEEE Catalog No. 87CH2401-8, Jun. 9-11, '87, pp. 187-190.
Chaudhuri Olik
Griffis Andrew
Hancock Earl C.
Sirr Francis A.
University of Colorado Foundation Inc.
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