Abrading – Abrading process – With tool treating or forming
Patent
1997-06-11
1999-11-02
Scherbel, David A.
Abrading
Abrading process
With tool treating or forming
451443, 451444, 451287, B24B 100
Patent
active
059759941
ABSTRACT:
A method and apparatus for selectively conditioning a planarizing surface of a polishing pad. In one embodiment, a conditioning system has a carrier assembly with an arm that may be positioned over a polishing pad, a conditioning element coupled to the arm, and an actuator coupled to the arm to move the conditioning element into engagement with the planarizing surface of the polishing pad. The conditioning element is an abrasive member, such as an abrasive disk or a brush. The conditioning system may also have a controller operatively coupled to the engagement actuator to control an operating parameter of the conditioning element as a function of the distribution of a surface characteristic across the planarizing surface of the polishing pad.
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Doan Trung Tri
Sandhu Gurtej Singh
Banks Derris H.
Micro)n Technology, Inc.
Scherbel David A.
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