Method and apparatus for selecting the resistivity of epitaxial

Fishing – trapping – and vermin destroying

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437 39, 437126, 437133, 437901, 310313R, H01G 700

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active

053209770

ABSTRACT:
A novel heterostructure acoustic charge transport (HACT) device is disclosed having an optimized charge density. The device includes a transducer fabricated on a substrate structure that launches surface acoustic waves. A reflector is formed in the substrate structure at an end portion adjacent to the transducer for reflecting the surface acoustic Waves. Also included is an electrode configured with the transport channel at an end thereof distal to the transducer for generating electrical signal equivalents of the propagating electrode charge. During fabrication, the resistivity of the layers initially configured at a lower than desired value. The layer is subsequently etched to raise the resistivity to the desired value.

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Howes et al, "Gallium Arsenide Materials, Devices and Circuits", John Wiley and Sons, Chichester U.K. 1985 pp. 123-125.

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