Method and apparatus for scheduling work in a fabrication...

Details Method and apparatus for scheduling work in a fabrication... Method and apparatus for scheduling work in a fabrication...

2007-06-26

2007-06-26

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C705S002000

Reexamination Certificate

active

11185388

ABSTRACT:
A method and apparatus for scheduling work in a semiconductor fabrication facility is provided. The method includes determining a time period associated with processing of at least one wafer, determining at least one due time associated with processing of the at least one wafer, and scheduling the at least one wafer for processing based on the time period and the at least one due time.

REFERENCES:
patent: 5140537 (1992-08-01), Tullis
patent: 5586021 (1996-12-01), Fargher et al.
patent: 5826040 (1998-10-01), Fargher et al.
patent: 6963785 (2005-11-01), Chen et al.
patent: 7039484 (2006-05-01), Daferner

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