Method and apparatus for scanning a specimen using an...

Details Method and apparatus for scanning a specimen using an... Method and apparatus for scanning a specimen using an...

2007-07-24

2007-07-24

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C250S559220, C356S237500

Reexamination Certificate

active

10604275

ABSTRACT:
The invention is based on an apparatus and a method for scanning specimens (1) using an optical imaging system (3) and a scanning stage (2), images of the specimen (1) being acquired by means of a camera (4), and/or measurements on the specimen (1) being made by means of an optical measurement device (5), at specimen points Xp, Yp. For that purpose, the scanning stage (2) is calibrated by obtaining and storing height values Z at different calibration positions X, Y of the scanning stage (2), and thereby generating a running height profile of the scanning stage (2). For the scanning of specimens (1), the specimen height positions Zpat specimen points Xp, Ypare determined by means of a reference height Zrefof the specimen (1) together with the running height profile of the scanning stage (2). While each specimen point Xp, Ypis being traveled to with the scanning stage (2) the relevant specimen height position Zpis already being set, so that running errors of the scanning stage (2) are compensated for and image acquisitions or measurements are possible immediately upon reaching the specimen point Xp, Yp.

REFERENCES:
patent: 5780866 (1998-07-01), Yamamura et al.
patent: 5804813 (1998-09-01), Wang et al.
patent: 6172349 (2001-01-01), Katz et al.
patent: 6245585 (2001-06-01), Fujimoto
patent: 6256093 (2001-07-01), Ravid et al.
patent: 6674058 (2004-01-01), Miller

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