Method and apparatus for rotation of a workpiece in...

Details Method and apparatus for rotation of a workpiece in... Method and apparatus for rotation of a workpiece in...

2006-09-19

2006-09-19

Markoff, Alexander (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S033000, C134S037000, C134S149000, C134S157000, C134S200000, C134S902000

Reexamination Certificate

active

07108001

ABSTRACT:
A supercritical fluid cleaning system uses process fluid for operating rotary motors in the chamber with fluid bearings and fluid load levitation for rotating workpieces and impellers. Rotating speed and direction sensors and a home position locator facilitate motor control. Impellers add further agitation of the fluid in the chamber, faster processing, and greater uniformity of supercritical fluid components and increase mass transfer of fluid to the processed surface. Centrifugal operated clips and cassettes hold wafers and impellers. Non-contact, fluid operated rotating mechanisms reduce contamination. Physical, rotational, and shear affects are enhanced through centrifugal forces which can induce the separation of films localized deposits or molecular products of the reaction from the surface. There is a concomitant agitation of fluid, and continuous angular acceleration imparted to the processed surface features.

REFERENCES:
patent: 3650129 (1972-03-01), Scroop et al.
patent: 4059959 (1977-11-01), Matthews
patent: 4077220 (1978-03-01), Matthews
patent: 4118927 (1978-10-01), Kronogard
patent: 4142108 (1979-02-01), Matthews
patent: 4380903 (1983-04-01), Matthews
patent: 5669251 (1997-09-01), Townsend et al.
patent: 6666928 (2003-12-01), Worm
patent: 6736906 (2004-05-01), Cotte et al.
patent: 6821356 (2004-11-01), Wandke et al.
patent: 19922195 (2000-11-01), None

Affiliated with

Also associated with

Rating

Method and apparatus for rotation of a workpiece in... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for rotation of a workpiece in..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for rotation of a workpiece in... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3551822