Method and apparatus for resetting individual processes in a con

Details Method and apparatus for resetting individual processes in a con Method and apparatus for resetting individual processes in a con

1994-05-27

1996-09-10

Envall, Jr., Roy N.

Boots, shoes, and leggings

134902, G06F 1900

Patent

active

055551777

ABSTRACT:
A method and apparatus for resetting a process in a control system. The steps in this method involve identifying a process for a portion of a double-sided wafer scrubber. Then, the process is reset.

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patent: 4618938 (1986-10-01), Sandland
patent: 4732173 (1988-03-01), Czaja
patent: 4960485 (1990-10-01), Ichinose et al.
patent: 5014208 (1991-05-01), Wolfson
patent: 5081733 (1992-01-01), Kudo
patent: 5216613 (1993-06-01), Head, III

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