Electric heating – Metal heating – By arc
Reexamination Certificate
2007-01-30
2007-01-30
Evans, Geoffrey S. (Department: 1725)
Electric heating
Metal heating
By arc
Reexamination Certificate
active
10660477
ABSTRACT:
A method of selectively ablating an undesired material from a substrate includes providing a substrate with two regions; providing laser pulses; tuning a wavelength of the laser pulses to match a desired wavelength characteristic of a material and directing the tuned laser pulses onto the substrate; and controlling a pulse duration, wavelength, or both, of the laser pulses to ablate the undesired material without damaging the substrate or any adjacent material. In another embodiment, an apparatus for repairing a defect on a reflective photomask includes a femtosecond pulse width laser; a harmonic conversion cell; a filter for passing a selected EUV harmonic of the laser light; a lens arrangement configured to direct the selected EUV harmonic of the laser light onto the photomask; and a control unit connected to the laser to control an ablation of the defect on the reflective photomask.
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Haight Richard A.
Longo Peter P.
Wagner Alfred
Connolly Bove & Lodge & Hutz LLP
Evans Geoffrey S.
Hume Larry
Morris, Esq. Daniel P.
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