Method and apparatus for removing reticle guides

Details Method and apparatus for removing reticle guides Method and apparatus for removing reticle guides

1987-12-24

1989-04-25

Simmons, David

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156344, 156359, 156584, B31B 100

Patent

active

048244961

ABSTRACT:
A method and apparatus for removing stepper guides that are adhesively bonded to a reticle. A reticle is supported in a generally horizontal position with the stepper guides in contact with heater blocks. Heating elements are placed within the heater blocks and are supplied with a controlled electrical current to maintain the heater blocks at a predetermined temperature. Heat is transferred from the heater blocks to the stepper guides. After a sufficient amount of time, the adhesive begins to flow and the stepper guides may be removed from the reticle. Separate heater blocks are configured to accommodate standard field and wide field guides.

REFERENCES:
patent: 2363442 (1944-11-01), Scott
patent: 2711984 (1955-06-01), Kingman

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