Method and apparatus for removing residual dirt adhered on dies

Details Method and apparatus for removing residual dirt adhered on dies Method and apparatus for removing residual dirt adhered on dies

1998-05-15

2000-10-31

Berman, Jack

Radiant energy

Radiant energy generation and sources

With radiation modifying member

2504921, 134 1, F21V 709, H01L 2156

Patent

active

061406597

ABSTRACT:
An apparatus for removing a residual dirt including at least any one of organic and inorganic substances from inner surfaces of dies is used between the dies, wherein the apparatus has an irradiation unit for irradiating a ray mainly includes an ultraviolet ray onto the residual dirt on the surfaces of the dies so that the irradiation of the ray causes a dissociation of atomic bonding or molecular bonding of the organic and inorganic substances of the residual dirt adhered on the inner surfaces of the dies, provided that the ray includes a component having an energy which is higher than the dissociation energies of the organic and inorganic substances.

REFERENCES:
patent: 5608227 (1997-03-01), Dierks et al.
patent: 5789755 (1998-08-01), Bender

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