Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate
2005-02-08
2005-02-08
Rutledge, D. (Department: 2851)
Photography
Fluid-treating apparatus
Fluid application to one side only of photographic medium
C396S626000, C396S627000, C134S001000, C134S010000, C134S011000, C134S038000, C156S922000, C430S329000, C438S723000
Reexamination Certificate
active
06851873
ABSTRACT:
A method and an apparatus for removing an organic film, such as a resist film, from a substrate surface are provided wherein a treatment liquid containing dissolved ozone, and preferably formed from liquid ethylene or propylene carbonate, or both, is contacted with the substrate having the organic film, and the organic film removed, wherein the apparatus contains (A) a treatment liquid delivery device, (B) a film contact device, (C) a liquid circulation device and (D) an ozone dissolution device.
REFERENCES:
patent: 5350489 (1994-09-01), Muraoka
patent: 5690747 (1997-11-01), Doscher
patent: 6645874 (2003-11-01), Torek et al.
Endo Mitsuru
Muraoka Hisashi
Muraoka Rieko
Sato Asuka
Nomura Micro Science Co., Ltd.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Rutledge D.
UMS Co., Ltd.
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