Method and apparatus for removing minute particles from a surfac

Details Method and apparatus for removing minute particles from a surfac Method and apparatus for removing minute particles from a surfac

1989-10-30

1991-01-22

Albritton, C. L.

Electric heating

Metal heating

By arc

2191216, 21912184, B23K 2600

Patent

active

049872869

ABSTRACT:
Method and apparatus for removing minute particles (as small as submicron) from a surface to which they are adhered. An energy transfer medium is interposed between each particle to be removed and the surface to which the particles are adhered. The medium is an irradiated with laser energy at a wavelength which is strongly absorbed by the medium. The medium absorbs sufficient energy to cause explosive evaporation with sufficient force to dislodge the particles. Preferably means are provided to remove dislodged particles to prevent redeposit on the surface.

REFERENCES:
patent: 4368080 (1983-01-01), Langen et al.
patent: 4670637 (1987-06-01), Morrison et al.
patent: 4720621 (1988-01-01), Langen
patent: 4752668 (1988-06-01), Rosenfeld et al.
"Contaminant and Defect Analysis of Optical Surfaces by Infrared Laser Induced Desorption", Susan D. Allen, Appl. Phys. Lett. 45(9), Nov. 1, 1984, pp. 997-999.

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