Method and apparatus for removing leaking gas in an integrated g

Details Method and apparatus for removing leaking gas in an integrated g Method and apparatus for removing leaking gas in an integrated g

1998-03-09

2000-11-07

Walton, George L.

Fluid handling

Processes

Cleaning, repairing, or assembling

134 21, 134 2211, 134 941, 134 981, 134169C, 137240, 137312, 13756501, 13756503, 137597, 137884, B08B 502, B08B 504, B08B 9035

Patent

active

061421642

ABSTRACT:
One aspect of the present invention provides an apparatus which permits the efficient purging of leaked process gas at the component-panel interface in an integrated gas panel system. The apparatus provides conduit structure for directing a flow of purging gas through a surface interface whereat a gas-manifold panel meets gas-manifold components. A further aspect of the invention provides a method for efficiently purging process gas which might leak out at the component-panel interface in an integrated gas panel system. The method includes the step of simultaneously directing a stream of purging gas along a pathway extending over the surface interface and along a pathway which intersects and passes through the surface interface.

REFERENCES:
patent: 4842683 (1989-06-01), Cheng et al.
patent: 5000113 (1991-03-01), Wang et al.
patent: 5163475 (1992-11-01), Gregoire
patent: 5313982 (1994-05-01), Ohmi et al.
patent: 5329463 (1994-07-01), Sierk et al.

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