Data processing: measuring – calibrating – or testing – Measurement system – Remote supervisory monitoring
Reexamination Certificate
2005-04-12
2005-04-12
Pert, Evan (Department: 2829)
Data processing: measuring, calibrating, or testing
Measurement system
Remote supervisory monitoring
Reexamination Certificate
active
06879940
ABSTRACT:
An apparatus is disclosed for remotely monitoring and developing steps in a semiconductor manufacturing process that includes, at least one remote workstation connected via a remote access link to a local workstation, and a test system connected via a link to the local workstation. A method is also disclosed that includes running a semiconductor test system remotely, monitoring the semiconductor test system remotely, and receiving data from the semiconductor test system remotely. Another embodiment includes an apparatus for remotely monitoring and developing steps in a semiconductor manufacturing process. This embodiment includes a plurality of remote workstations each connected via a remote access link to a local workstation, and a test system connected via a link to a local workstation. Security features in this embodiment prevent any one remote workstation from accessing any other remote workstation.
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Crist Fredrick W.
Wagner Timothy J.
Credence Systems Corporation
Pert Evan
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