Method and apparatus for rejuvenating ion sources

Details Method and apparatus for rejuvenating ion sources Method and apparatus for rejuvenating ion sources

1977-07-27

1979-01-16

Dixon, Harold A.

Radiant energy

Ion generation

Electron bombardment type

250423R, 313359, H01J 2700

Patent

active

041350944

ABSTRACT:
Ion sources which become coated with insulative materials are rejuvenated by forming the repeller electrode in the ion source of gold and bombarding such repeller electrode with ions to sputter the gold onto the coated surfaces to render them conductive again. Gold sputtering is accomplished by bombarding the gold repeller electrode with inert argon ions.
To perform this method, the slit of the extractor plate on the ion source is greatly reduced in cross-sectional area such that the normally higher sputtering pressures may be maintained within the ion source itself. If a direct sample probe is used, it too may be formed of gold and used to provide the gold sputtering source.

REFERENCES:
patent: 3393339 (1968-07-01), Hill et al.

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