Method and apparatus for regulating evaporating rate and layer b

Details Method and apparatus for regulating evaporating rate and layer b Method and apparatus for regulating evaporating rate and layer b

1976-11-10

1979-02-20

Reynolds, Wm. Carter

Coating apparatus

With vacuum or fluid pressure chamber

118 491, C23C 1304

Patent

active

041400780

ABSTRACT:
An arrangement for regulating the evaporation rate and the layer buildup in the production of optically effective thin layers in a vacuum on substrates with controlled evaporator power and with continuous measuring of the optical characteristics of the deposited layer. The evaporation is started with a given evaporator power and with the start of change of the optical characteristics of the layer, the measured result after forming the time derivative is continuously compared with the output signal of a signal generator. This output signal reproduces the time rate of change of the optical properties during the layer buildup. The difference signal of the comparison signal is used to increase the evaporator power if the layer buildup lags, and to reduce this power if the layer buildup is too fast.

REFERENCES:
patent: 3071533 (1963-01-01), Blankenship
patent: 3734620 (1973-05-01), Cade
patent: 3800738 (1974-04-01), Tassara
patent: 3853093 (1974-12-01), Baker et al.
patent: 4024291 (1977-05-01), Wilmans

Affiliated with

Also associated with

Rating

Method and apparatus for regulating evaporating rate and layer b does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for regulating evaporating rate and layer b, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for regulating evaporating rate and layer b will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-253375