Geometrical instruments – Gauge – Collocating
Reexamination Certificate
2004-08-24
2008-03-04
Bennett, G. Bradley (Department: 2859)
Geometrical instruments
Gauge
Collocating
C033S297000, C355S053000
Reexamination Certificate
active
07337552
ABSTRACT:
A method and apparatus for front to back substrate registration is described. Alignment characteristics of features on surfaces of substrates can be used to physically align substrates with a multiplicity of integrated alignment optics. Measurement of offsets of the integral alignment optics are used to compute registration data for use in calibration of the substrate global alignment.
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Hunter, Jr. Robert O.
Khuu Thomas K.
McArthur Bruce B.
Smith Adlai H.
Yamaguchi Yuji
Bennett G. Bradley
Cohen Amy R.
Litel Instruments
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