Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent
1995-07-07
1998-10-27
Walberg, Teresa J.
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
118725, 427255, C23L 1600, H01L 21316
Patent
active
058280367
ABSTRACT:
A furnace with a large quartz tube with a gas inlet on one end, and a large opening at the other end for introducing and withdrawn wafers on a support. At least one small quartz tube is provided within and adjacent the sidewall of the large tube that has a gas inlet on one end outside of the large tube, and apertures in the sidewall. In use, a major stream of gas is provided by a gas inlet on the large tube that flows longitudinally through the large tube. A series of secondary streams of gas are provided from the apertures in the small tube that flow perpendicular to the major stream and across the surfaces of the wafers.
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Houn Edward
Hsue Chen-Chiu
Pelham J.
United Microelectronics Corporation
Walberg Teresa J.
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