Method and apparatus for refining boron-containing silicon...

Chemistry of inorganic compounds – Boron or compound thereof – Binary compound

Reexamination Certificate

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Reexamination Certificate

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07815882

ABSTRACT:
In a refining method for boron-containing silicon, boron-containing silicon is irradiated with an electron beam in a vacuum vessel to melt the boron-containing silicon. A boron compound-forming substance is introduced into the vacuum vessel, and boron contained in the molten silicon is formed into a boron compound. After at least a portion of the boron compound has vaporized, irradiation with the electron beam is stopped. The high-purity molten silicon can then be solidified.

REFERENCES:
patent: 4462806 (1984-07-01), Mahoney et al.
patent: 5182091 (1993-01-01), Yuge et al.
patent: 5534314 (1996-07-01), Wadley et al.
patent: 6368403 (2002-04-01), Schmid et al.

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