Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2007-05-01
2009-12-08
Feliciano, Eliseo Ramos (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S030000, C702S183000, C702S187000
Reexamination Certificate
active
07630859
ABSTRACT:
The present invention is directed to a method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment. One or more clouded viewport windows are obtained for testing, in which the clouding results from exposure to the reactive environment. The clouding typically appears as a coating film on the test windows. The clouded viewport windows are analyzed for one or more spectral regions having good transmission. The threshold level of light transmission is determined by the particular application in which the window is used. The spectral regions of good transmission are evaluated for their usefulness with a particular algorithm that will use the spectral data in a production environment. Spectral regions that cannot be evaluated using the subject algorithm are eliminated from consideration. Spectral regions that can be evaluated using the subject algorithm and exhibit low absorption are selected for monitoring in the production environment.
REFERENCES:
patent: 5347138 (1994-09-01), Aqui et al.
patent: 5348614 (1994-09-01), Jerbic
patent: 5352902 (1994-10-01), Aoki
patent: 5536359 (1996-07-01), Kawada et al.
patent: 5897378 (1999-04-01), Eriguchi
patent: 5966586 (1999-10-01), Hao
patent: 5985032 (1999-11-01), Eriguchi
patent: 6129807 (2000-10-01), Grimbergen et al.
patent: 6269278 (2001-07-01), Smith, Jr. et al.
patent: 6278809 (2001-08-01), Johnson et al.
patent: 6344151 (2002-02-01), Chen et al.
patent: 6540587 (2003-04-01), Gotkis et al.
patent: 6603538 (2003-08-01), Oluseyi et al.
patent: 6740196 (2004-05-01), Lee et al.
patent: 6750977 (2004-06-01), Otsubo et al.
patent: 6835275 (2004-12-01), Grimbergen et al.
patent: 6919279 (2005-07-01), Rulkens et al.
patent: 7074310 (2006-07-01), Smalley et al.
patent: 7102132 (2006-09-01), Ludviksson
patent: 7172969 (2007-02-01), Xia et al.
patent: 2003/0016354 (2003-01-01), Hui
patent: 2005/0060103 (2005-03-01), Chamness
patent: 2005/0173375 (2005-08-01), Mitrovic et al.
Giuseppe Fazio, Pietro Petruzza, and Alessandro Spandre, New Optical Range Inspection and Improving Optical Response for Spectroscopic Base Endpoint Detection, Future Fab Intl. vol. 20, Jan. 7, 2006. (http://vvww.future-fab.com/documents.aso?d ID=3710) (last visted Apr. 30, 2007).
Oriel Integrating Spheres, Specification Sheet, Newport Corporation (newport.com/file—store/PDFs/.../e5496—Oriel-Integrating-Spheres.pdf) (last visited Apr. 30, 2007).
Buchel, Jr. Rudolph J.
Feliciano Eliseo Ramos
Huynh Phuong
Verity Instruments Inc.
LandOfFree
Method and apparatus for reducing the effects of window... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for reducing the effects of window..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for reducing the effects of window... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4097782