Method and apparatus for reducing specular reflections in...

Details Method and apparatus for reducing specular reflections in... Method and apparatus for reducing specular reflections in...

2006-03-07

2006-03-07

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular resonant cavity

Specified cavity component

C372S092000, C372S098000, C372S043010

Reexamination Certificate

active

07010012

ABSTRACT:
The present invention is directed a method of fabricating a VCSEL. First, a substrate with a back surface and a front surface is provided. Then, a first reflector, an active region, and a second reflector are disposed on the front surface. The first reflector is disposed on the front surface. The active region is interposed between the first reflector and the second reflector. Then, anti-reflection features are formed into the back surface of the substrate to reduce specular reflection of light into the active region.

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patent: 6545296 (2003-04-01), Mukaihara et al.
patent: 6562644 (2003-05-01), Ishida et al.

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