Method and apparatus for reducing particulate contamination in p

Details Method and apparatus for reducing particulate contamination in p Method and apparatus for reducing particulate contamination in p

1991-02-28

1992-09-08

Bucci, David A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414786, 414DIG5, 454187, H01L 2168

Patent

active

051453037

ABSTRACT:
A load lock removes particulate contamination during microelectronic manufacturing. The load lock may have a single door or two doors, or a single door and a funnel valve. A passageway is defined through the load lock when the door or doors, or the funnel valve, are opened. The particulate contamination is removed from the load lock by providing a laminar flow of gas through the passageway. The source for generating the laminar flow may be external to the load lock or internal to the load lock.

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