Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2006-04-26
2009-10-27
Larkin, Daniel S (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07607342
ABSTRACT:
A cantilever probe-based instrument is controlled to reduce the lateral loads imposed on the probe as a result of probe/sample interaction. In a preferred embodiment, the probe tip and/or sample are driven to move laterally relative to one another as a function of cantilever deflection in order to compensate for lateral tip motion that would otherwise be caused by cantilever deflection. In the case of a probe having a passive cantilever, the sample and/or the probe as a whole are driven to move laterally to obtain the desired magnitude of compensation as direct function of cantilever deflection. In the case of a probe having an active cantilever, the sample or probe may be moved as a function of cantilever drive signal, or the cantilever may be controlled to bend as a function of cantilever drive signal so that the tip moves to obtain the desired magnitude of compensation.
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Huang Lin
Meyer Charles
Boyle Fredrickson , S.C.
Larkin Daniel S
Vecco Instruments, Inc.
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