Method and apparatus for reducing charge injection in...

Details Method and apparatus for reducing charge injection in... Method and apparatus for reducing charge injection in...

2005-11-29

2005-11-29

Zweizig, Jeffrey (Department: 2816)

Miscellaneous active electrical nonlinear devices, circuits, and

Gating

Signal transmission integrity or spurious noise override

C327S108000, C327S309000

Reexamination Certificate

active

06970031

ABSTRACT:
A control circuit for a MEMS (Micro-Electro-Mechanical System) has a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of spatially arranged fixed and movable plates of a variable capacitor, and is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source. A charge injection control circuit is associated with the semiconductor switch and attenuates current injection into the selected one of the fixed and movable plates of the capacitor.

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