Electric heating – Heating devices – With power supply and voltage or current regulation or...
Patent
1988-09-09
1990-01-02
Albritton, C. L.
Electric heating
Heating devices
With power supply and voltage or current regulation or...
2191216, 21912183, H05B 102
Patent
active
048914991
ABSTRACT:
A silicon semiconductor wafer (26) is placed in a vacuum chamber (12) device side (28) facedown. Laser beams of equal power are directed at an edge point (72) and a center point (74) of the wafer (26). The laser beams are reflected from the edge point (72) and the center point (74) into first and second infrared photo-detectors (40-42). A differential amplifier (44) evaluates the reflected laser beams for a power difference and signals a current source (82). Current source (82) heats a quartz ring (46) which surrounds the wafer (26). The quartz ring (46) passes the heat to the wafer (26) until the amplifier (44) no longer senses a power difference, which is indicative of an equal wafer surface temperature.
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Albritton C. L.
Comfort James T.
Rogers Joseph E.
Sharp Melvin
Texas Instruments Incorporated
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