Optics: measuring and testing – Material strain analysis – By light interference detector
Patent
1994-04-04
1995-06-20
Turner, Samuel A.
Optics: measuring and testing
Material strain analysis
By light interference detector
356357, 73800, G01L 124
Patent
active
054264987
ABSTRACT:
A displacement measuring method and device is disclosed in which speckle amplitude interferometry within a single speckle feature or a small number of features of a speckle pattern is used to achieve sub-fringe accuracy with a single detector and to measure displacement of the object under investigation with sub-wavelength accuracy at measurement speeds consistent with real-time control of manufacturing processes. The same technique applied to multiple spots on a sample with optical means for causing interference between different combinations of scattered fields, including fields from different illuminated spots, permits measurements of the total sample motion.
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patent: 5061860 (1991-10-01), Takemori
R. Dandliker et al; Measuring Microvibrations by Heterodyne Speckle interferometry; Dec. 4, 1980; pp. 165-167.
Laser Speckle and Related Phenomena; 1975; pp. 1-7; Dainty, J. C.
Speckel Metrology; 1993; Sirohi, R.; pp. V-IX.
Donald E. Duffy; Moire Gauging of In Plane Displacement Using Double Aperature Imaging; Aug. 1972; pp. 1778-1781.
Rene Dandliker; Heterodyne Holographic Interferometry; 1980; pp. 3-84, Book Author Wolf, E., Progress In Optics XVII.
Brueck Steven R. J.
Burckel David B.
Frauenglass Andrew
Zaidi Saleem
Becker Robert
Eisenberg Jason D.
Sopp Albert
Turner Samuel A.
University of New Mexico
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