Method and apparatus for real-time speckle interferometry for st

Optics: measuring and testing – Material strain analysis – By light interference detector

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356357, 73800, G01L 124

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active

054264987

ABSTRACT:
A displacement measuring method and device is disclosed in which speckle amplitude interferometry within a single speckle feature or a small number of features of a speckle pattern is used to achieve sub-fringe accuracy with a single detector and to measure displacement of the object under investigation with sub-wavelength accuracy at measurement speeds consistent with real-time control of manufacturing processes. The same technique applied to multiple spots on a sample with optical means for causing interference between different combinations of scattered fields, including fields from different illuminated spots, permits measurements of the total sample motion.

REFERENCES:
patent: 4322162 (1982-03-01), McKelvie et al.
patent: 5061860 (1991-10-01), Takemori
R. Dandliker et al; Measuring Microvibrations by Heterodyne Speckle interferometry; Dec. 4, 1980; pp. 165-167.
Laser Speckle and Related Phenomena; 1975; pp. 1-7; Dainty, J. C.
Speckel Metrology; 1993; Sirohi, R.; pp. V-IX.
Donald E. Duffy; Moire Gauging of In Plane Displacement Using Double Aperature Imaging; Aug. 1972; pp. 1778-1781.
Rene Dandliker; Heterodyne Holographic Interferometry; 1980; pp. 3-84, Book Author Wolf, E., Progress In Optics XVII.

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