Method and apparatus for rapid inline measurement of...

Details Method and apparatus for rapid inline measurement of... Method and apparatus for rapid inline measurement of...

2006-08-01

2006-08-01

Raymond, Edward (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Electrical signal parameter measurement system

C438S016000

Reexamination Certificate

active

07085658

ABSTRACT:
A method and apparatus for monitoring a plurality of semiconductor devices is disclosed. At least one array of 2nsemiconductor circuits is provided. A clock ring oscillator provides a clock signal. The clock signal drives a frequency divider followed by an n-stage binary counter. The outputs from the counter's stages drive an n-input decoder which sequentially addresses each semiconductor circuit. An output signal from each semiconductor circuit is measured and read out over a common bus, where a distribution of the output signals is a measure of a distribution of a parameter of interest.

REFERENCES:
patent: 3900837 (1975-08-01), Hunter
patent: 5276648 (1994-01-01), Yanagisawa et al.
patent: 2002/0191469 (2002-12-01), Honma et al.
patent: 2004/0053429 (2004-03-01), Muranaka

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