Printing – Stenciling – Stencil and work support
Reexamination Certificate
2006-09-19
2006-09-19
Hirshfeld, Andrew H. (Department: 2854)
Printing
Stenciling
Stencil and work support
C101S127100, C101S129000, C101S423000, C034S080000, C034S105000
Reexamination Certificate
active
07107901
ABSTRACT:
A method and apparatus for the rapid cooling of screen masks used in the fabrication of semiconductor components is provided. The method and apparatus use a specially designed cooling plate which is contacted with a mask frame holding the screening mask. After a heated cleaning step which cleans the mask frame and screening mask of metal paste used in the screening operation, the cooling plate having one or more concave lower surfaces contacts the upper surfaces of the mask frame and bends the mask frame in the shape of the concave surfaces. This ensures intimate contact between the cooling plate and mask frame and enhances the thermal efficiency of the cooling step.
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Bezama Raschid J
Harkins William W
Long David C
Miller Jason S
Pepe Christopher E
Cioffi James J.
Culler Jill E.
DeLio & Peterson LLC
Hirshfeld Andrew H.
Tomaszewski John J.
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