Method and apparatus for randomizing dispatch order for...

Details Method and apparatus for randomizing dispatch order for... Method and apparatus for randomizing dispatch order for...

2007-10-02

2010-02-23

Patel, Ramesh B (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S099000, C700S100000, C700S112000, C700S115000, C700S222000

Reexamination Certificate

active

07668615

ABSTRACT:
A method for dispatching wafers for processing in a tool includes identifying a queue of wafers available to be processed in the tool. One of the wafers is randomly selected based at least in part on a length of time each wafer has been in the queue. The selected wafer is dispatched for processing in the tool.

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