Method and apparatus for radiation testing of electron devices

Details Method and apparatus for radiation testing of electron devices Method and apparatus for radiation testing of electron devices

1983-04-04

1986-03-11

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, G01R 3126, G01R 3102

Patent

active

045756767

ABSTRACT:
A test apparatus for electron devices, such as integrated circuits, at the wafer stage of fabrication, wherein a beam of ionizing radiation is directed through an electrical probe card and onto the wafer under test. The probe card and the radiation beam share a common port through which a selected device or group of devices is exposed, but other devices on the wafer are not similarly exposed. A microscope, supported on a frame, is interchangeable with the radiation beam source, sharing the common port, so that a tested device may be observed.

REFERENCES:
patent: 3437929 (1969-04-01), Glenn
patent: 4287473 (1981-09-01), Sawyer
"The Use of an Industrial X-Ray Source for Electronic Component Radiation Effects Work", Leonard Adams & Iam Thompson, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol. CHMT-3, No. 1, Mar. 1980.

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