Method and apparatus for radiation hardened isolation

Details Method and apparatus for radiation hardened isolation Method and apparatus for radiation hardened isolation

1996-01-16

1997-09-23

Dang, Trung

Fishing, trapping, and vermin destroying

437240, 437938, H01L 2176

Patent

active

056704135

ABSTRACT:
A radiation hardening isolation technique uses a poly buffered LOCOS structure (34, 36) to protect the device areas during field oxide 40 formation. The field oxide 40 is removed, and the polysilicon structure 34 is covered with a PSG or BPSG layer 42. Layer 42 is planarized and the polysilicon 34 is removed to provide a self-aligned device region 31.

REFERENCES:
patent: 4942449 (1990-07-01), Wei et al.
patent: 4994407 (1991-02-01), Custode et al.
patent: 5225358 (1993-07-01), Pasch
patent: 5418174 (1995-05-01), Kalnitsky

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