Method and apparatus for quantitative, non-resonant photoionizat

Details Method and apparatus for quantitative, non-resonant photoionizat Method and apparatus for quantitative, non-resonant photoionizat

1994-07-26

1998-06-09

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

Ion beam pulsing means with detector synchronizing means

250282, 250423P, B01D 5944, H01J 4900

Patent

active

057638756

ABSTRACT:
A mass spectrographic method and apparatus provide simultaneous quantification of multiple target species of gaseous neutral particles that may be laser sputtered from a sample. The invention employs non-resonant multiphoton ionization of the target species with a high intensity laser beam propagated toward a given extraction volume from which volume ions are withdrawn for quantification. In preferred embodiments, the given volume is defined by an acceptance aperture and a transverse energy acceptance interval which is itself defined by energy discrimination of the ions into bunches with a novel ion mirror. An inventive embodiment of ion mirror has four grids at different spacings and potentials with a second grid away from the acceptance aperture having a potential just below a third to separate out an undesired, low-energy ion bunch. Curves for simultaneously quantifying Ta.sup.+ ions with Ta.sup.++ ions are shown.

REFERENCES:
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patent: 5160840 (1992-11-01), Vestal
patent: 5202563 (1993-04-01), Cotter et al.
patent: 5300774 (1994-04-01), Buttrill
patent: 5365063 (1994-11-01), Kaesdorf et al.
"Can nonresonant multiphoton ionization be ultrasensitive?" by C.H. Becker and K. T. Gillen J. Op. Soc. Am. B/vol. 2, No. 9, Sep. 1985, 1438-1443.

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